The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2017
Filed:
Jul. 17, 2014
Applicant:
Murata Machinery, Ltd., Kyoto, Kyoto, JP;
Inventors:
Masanao Murata, Ise, JP;
Mitsuya Tokumoto, Inuyama, JP;
Takashi Yamaji, Ise, JP;
Naruto Adachi, Inuyama, JP;
Assignee:
MURATA MACHINERY, LTD., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01); G01N 33/00 (2006.01); G05D 7/06 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67393 (2013.01); G01N 33/0036 (2013.01); G05D 7/0617 (2013.01); H01L 21/67017 (2013.01); H01L 21/67389 (2013.01); H01L 21/67769 (2013.01);
Abstract
The safety of a worker is ensured, and the area in which purging is halted is limited to the minimum. The inner space of a device is divided into a working area and a non-working area, and purging of articles in the working area is halted and the purging of the articles in the non-working area is continued. The oxygen concentration in the working area is measured, and if the oxygen concentration of the working area decreases to a predetermined value or less, the purging of the articles in the non-working area is halted.