The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 03, 2017

Filed:

May. 31, 2012
Applicants:

Harutada Dewa, Musashino, JP;

Kiyoyasu Hiwada, Musashino, JP;

Akira Nakazawa, Kobe, JP;

Inventors:

Harutada Dewa, Musashino, JP;

Kiyoyasu Hiwada, Musashino, JP;

Akira Nakazawa, Kobe, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 1/067 (2006.01); H01L 21/66 (2006.01); G01R 31/36 (2006.01);
U.S. Cl.
CPC ...
G01R 1/067 (2013.01); G01R 1/06744 (2013.01); G01R 1/06761 (2013.01); G01R 31/3624 (2013.01); G01R 31/3665 (2013.01); H01L 22/14 (2013.01);
Abstract

A testing device and method of a quantum battery by a semiconductor probe capable of evaluating electric characteristics of a charge layer in the middle of a production process of the quantum battery without damaging the charge layer. On semiconductor probe constituted by stacking electrode and metal oxide semiconductor on support body, and probe charge layer is formed of the same material as that of quantum battery and irradiated with ultraviolet rays. Forming probe charge layer of same material as that of quantum battery on semiconductor probe enables evaluation without damaging charge layer of the quantum battery. Testing device and method are provided which measure the charge/discharge characteristics of a charge layer in the middle of producing the quantum battery by a voltmeter and a constant current source or a discharge resistor by using the semiconductor probe including the probe charge layer.


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