The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2017
Filed:
Aug. 03, 2015
Applicant:
Memssensors, Inc., San Jose, CA (US);
Inventor:
John She Bai, Los Gatos, CA (US);
Assignee:
DUNAN SENSING, LLC, San Jose, CA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 19/14 (2006.01); G01L 19/00 (2006.01);
U.S. Cl.
CPC ...
G01L 19/142 (2013.01); G01L 19/0076 (2013.01);
Abstract
A hermetically-sealed universal pressure sensor comprises a MEMS disk, a compensate disk, and an optional interconnect ring. The MEMS disk has one or more MEMS dies that can convert ambient pressures to electrical signals, which is processed and compensated at an integrated circuit on the compensate disk. The interconnect ring can optionally provide electrical connections and hermetic seal properties between the MEMS disk and the compensate disk.