The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 03, 2017

Filed:

Nov. 30, 2012
Applicant:

National Institute of Advanced Industrial Science and Technology, Chiyoda-ku, Tokyo, JP;

Inventors:

Shinichi Ikeda, Tsukuba, JP;

Shiro Hara, Tsukuba, JP;

Takanori Mikahara, Tsukuba, JP;

Hitoshi Habuka, Tsukuba, JP;

Sommawan Khumpuang, Tsukuba, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 13/16 (2006.01); C23C 16/48 (2006.01); F27B 17/00 (2006.01); H01L 21/67 (2006.01); C30B 13/24 (2006.01); F27D 99/00 (2010.01);
U.S. Cl.
CPC ...
C23C 16/482 (2013.01); C30B 13/24 (2013.01); F27B 17/0025 (2013.01); H01L 21/67115 (2013.01); F27D 2099/0026 (2013.01); Y10T 117/108 (2015.01);
Abstract

Provide a converging mirror-based furnace for heating a target by way of reflecting from a reflecting mirror unit the light emitted from a light source and then irradiating a target with the reflected light, wherein said target-heating converging-light furnace is such that: the reflecting mirror unit comprises a primary reflecting mirror and secondary reflecting mirror; the light emitted from the light source is reflected sequentially by the primary reflecting mirror and secondary reflecting mirror and then irradiated onto the target; and the light reflected by the secondary reflecting mirror and irradiated onto the target surface is not perpendicular to the target surface. Based on the above, a system that uses converged infrared light to provide heating can be made smaller while keeping its heating performance intact, even when the system uses a revolving ellipsoid.


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