The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2017
Filed:
Oct. 26, 2010
Applicants:
David A. Smith, Bellefonte, PA (US);
James B. Mattzela, State College, PA (US);
Paul H. Silvis, Port Matilda, PA (US);
Gary A. Barone, State College, PA (US);
Inventors:
David A. Smith, Bellefonte, PA (US);
James B. Mattzela, State College, PA (US);
Paul H. Silvis, Port Matilda, PA (US);
Gary A. Barone, State College, PA (US);
Assignee:
Silcotek Corp., Bellefonte, PA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/42 (2006.01); C23C 16/32 (2006.01); C23C 8/10 (2006.01); C23C 16/56 (2006.01); B05D 1/00 (2006.01);
U.S. Cl.
CPC ...
C23C 16/325 (2013.01); C23C 8/10 (2013.01); C23C 16/56 (2013.01); B05D 1/60 (2013.01); B05D 2202/15 (2013.01); Y10T 428/24802 (2015.01);
Abstract
The present invention relates to a chemical vapor deposition coating, a chemical vapor deposition article, and a chemical vapor deposition method. The coating, article, and method involve thermal decomposition of dimethylsilane to achieve desired surface properties.