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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9777364 B1

PDFFull Text
Date of Patent:
Oct. 03, 2017

Filed:

Jun. 10, 2016

Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same

Applicant:

Samsung Display Co., Ltd., Yongin-si, Gyeonggi-do, KR;

Inventors:

Seok-Rak Chang, Yongin-si, KR;

Myeng-Woo Nam, Yongin-si, KR;

Hee-Cheol Kang, Yongin-si, KR;

Jong-Heon Kim, Yongin-si, KR;

Jong-Won Hong, Yongin-si, KR;

Uno Chang, Yongin-si, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-si, KR;

Attorney:

Lewis Roca Rothgerber Christie LLP

Primary Examiner:

Lex Malsawma

Assistant Examiner:

Eric W Jones

Int. Cl.
CPC ...
B65G 35/00 (2006.01); C23C 14/12 (2006.01); C23C 14/50 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 21/683 (2006.01); B05B 13/02 (2006.01); B05B 15/04 (2006.01); B05D 1/00 (2006.01); C23C 14/04 (2006.01); C23C 14/24 (2006.01); H01L 27/32 (2006.01); H01L 51/56 (2006.01);
U.S. Cl.
CPC ...
C23C 14/12 (2013.01); B05B 13/0221 (2013.01); B05B 15/045 (2013.01); B05B 15/0437 (2013.01); B05D 1/60 (2013.01); C23C 14/042 (2013.01); C23C 14/24 (2013.01); C23C 14/50 (2013.01); H01L 21/6776 (2013.01); H01L 21/67173 (2013.01); H01L 21/67709 (2013.01); H01L 21/67784 (2013.01); H01L 21/6831 (2013.01); H01L 27/3244 (2013.01); H01L 27/3246 (2013.01); H01L 51/56 (2013.01);
Abstract

An organic layer deposition apparatus, and a method of manufacturing an organic light-emitting display device using the organic layer deposition apparatus. The organic layer deposition apparatus includes: an electrostatic chuck that fixedly supports a substrate that is a deposition target; a deposition unit including a chamber maintained at a vacuum and an organic layer deposition assembly for depositing an organic layer on the substrate fixedly supported by the electrostatic chuck; and a first conveyor unit for moving the electrostatic chuck fixedly supporting the substrate into the deposition unit, wherein the first conveyor unit passes through inside the chamber, and the first conveyor unit includes a guide unit having a receiving member for supporting the electrostatic chuck to be movable in a direction.

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