The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2017
Filed:
Dec. 04, 2014
Applicant:
Shin-etsu Chemical Co., Ltd., Tokyo, JP;
Inventors:
Yoshinori Hirano, Annaka, JP;
Hideyoshi Yanagisawa, Annaka, JP;
Assignee:
SHIN-ETSU CHEMICAL CO., LTD., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/023 (2006.01); C08G 8/28 (2006.01); C08G 14/10 (2006.01); G03F 7/038 (2006.01); G03F 7/022 (2006.01); C08G 8/00 (2006.01); C08L 61/00 (2006.01); C08L 61/04 (2006.01); C08L 61/20 (2006.01);
U.S. Cl.
CPC ...
C08G 8/28 (2013.01); C08G 8/00 (2013.01); C08G 14/10 (2013.01); C08L 61/00 (2013.01); C08L 61/04 (2013.01); C08L 61/20 (2013.01); G03F 7/023 (2013.01); G03F 7/0226 (2013.01); G03F 7/0236 (2013.01); G03F 7/038 (2013.01); G03F 7/0382 (2013.01);
Abstract
A modified novolak phenolic resin is obtained by reacting a novolak phenolic resin containing at least 50 wt % of p-cresol with a crosslinker. This method increases the molecular weight of the existing novolak phenolic resin containing at least 50 wt % of p-cresol to such a level that the resulting modified novolak phenolic resin has heat resistance enough for the photoresist application.