The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 03, 2017

Filed:

Mar. 31, 2016
Applicant:

Coreflow Ltd., Daliyat al-Karmel, IL;

Inventors:

Isaac Naor, Hod-HaSharon, IL;

Ronen Lautman, Haifa, IL;

Assignee:

Core Flow Ltd., Daliyat al-Karmel, IL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G 53/02 (2006.01); B65G 47/84 (2006.01); B65G 51/03 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
B65G 47/848 (2013.01); B65G 51/03 (2013.01); H01L 21/67259 (2013.01); H01L 21/67706 (2013.01); H01L 21/67721 (2013.01);
Abstract

A system for conveying a substrate includes a noncontact support platform for supporting the substrate. A vacuum wheel is located adjacent to the support platform. A rim of the vacuum wheel includes perforations that open between an exterior of the rim and an interior of the vacuum wheel. A fixed suction surface is interior to the vacuum wheel and includes an opening of a conduit that is connectable to a suction source. A chamber is formed by the suction surface, walls of the vacuum wheel, and a section of the peripheral rim that is adjacent to the suction surface and that extends outward from the support platform. When suction is applied to the conduit, the suction is applied via the chamber to the perforations in the rim section so as to exert a pull on the substrate toward the rim such that rotation of the vacuum wheel conveys the substrate.


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