The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 03, 2017
Filed:
Oct. 28, 2016
Applicant:
Hirata Corporation, Kumamoto-shi, Kumamoto-ken, JP;
Inventors:
Tetsuya Sakai, Kumamoto, JP;
Hideki Sakaue, Kumamoto, JP;
Assignee:
HIRATA CORPORATION, Kumamoto-Shi, Kumamoto-Ken, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); B25J 15/00 (2006.01); B25J 11/00 (2006.01);
U.S. Cl.
CPC ...
B25J 15/0014 (2013.01); B25J 11/0095 (2013.01); H01L 21/68707 (2013.01);
Abstract
A hand member forms a hand of a robot arm for transferring a semiconductor wafer. The hand member is a U-shaped member on which the semiconductor wafer is placed. The hand member includes at least one fitting portion on which a frictional holding member for holding the semiconductor wafer is fitted sideways, on each of an inner edge and an outer edge.