The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2017
Filed:
Dec. 18, 2014
Applicant:
Youtec Co., Ltd., Chiba, JP;
Inventors:
Assignee:
YOUTEC CO., LTD., Chiba, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/207 (2006.01); H01L 41/187 (2006.01); H01L 41/08 (2006.01); H01L 41/319 (2013.01); C04B 35/491 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1876 (2013.01); C04B 35/491 (2013.01); H01L 41/0815 (2013.01); H01L 41/319 (2013.01); C04B 2235/787 (2013.01);
Abstract
To obtain a piezoelectric film having excellent piezoelectric properties. An aspect of the present invention is a piezoelectric film having a crystal oriented in the c-axis direction and a crystal oriented in the a-axis direction, in which, when denoting the amount of a (004) component of the crystal oriented in the c-axis direction by C and denoting the amount of a (400) component of the crystal oriented in the a-axis direction by A, the piezoelectric film satisfies a formula 1 below./()≧0.1  formula 1