The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 26, 2017

Filed:

Oct. 26, 2015
Applicant:

Cemecon Ag, Wurselen, DE;

Inventor:

Walter May, Aachen, DE;

Assignee:

CemeCon AG, Würselen, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/35 (2006.01); H01J 37/34 (2006.01); H01J 37/32 (2006.01); H05H 1/48 (2006.01); C23F 4/04 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3411 (2013.01); C23C 14/35 (2013.01); C23F 4/04 (2013.01); H01J 37/3244 (2013.01); H01J 37/32596 (2013.01); H01J 37/3405 (2013.01); H05H 1/48 (2013.01);
Abstract

A device and method for generating an electrical discharge are described. A first electrode () is operated to be a cathode relative to a second electrode (). A gas is introduced into the chamber () by the first electrode (). The first electrode () has a closed antechamber () with a metal wall (). A tube () consisting of a different material than the wall () is provided through which the gas from the antechamber () is conducted into the chamber (). A front portion of the tube () is embedded in the wall () of the antechamber (). In its rear portion, the tube () has a free end projecting into the antechamber (). A stable electrical discharge can be generated thereby in a particularly easy manner.


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