The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2017
Filed:
Jul. 23, 2014
Applicant:
Sensirion Ag, Stafa, CH;
Inventors:
Assignee:
Sensirion AG, Stafa, CH;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 7/00 (2006.01); G01N 9/00 (2006.01); H01L 27/14 (2006.01); G01N 33/00 (2006.01); G01N 27/04 (2006.01); G01N 27/12 (2006.01);
U.S. Cl.
CPC ...
G01N 33/0027 (2013.01); G01N 27/04 (2013.01); G01N 27/122 (2013.01); G01N 27/128 (2013.01);
Abstract
A chemical sensor () is described with at least one layer of a metal oxide () arranged between two current injecting electrodes (') with the length (L) of the layer of a metal oxide between the current injecting electrodes being less than 50 microns and one or a pair of voltage sensing electrodes () connected to the layer of a metal oxide () with the electrodes () forming a 3- or 4-terminal arrangement for determining the resistance changes of layer material () excluding series resistances such as contact resistances close to or at at least one of the current injecting electrodes () from the resistance measurement.