The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 26, 2017
Filed:
Mar. 06, 2013
Applicant:
Ams International Ag, Rapperswil-Jona, CH;
Inventors:
Willem Frederik Adrianus Besling, Eindhoven, NL;
Martijn Goossens, Veldhoven, NL;
Jozef Thomas Martinus van Beek, Rosmalen, NL;
Peter Gerard Steeneken, Valkenswaard, NL;
Olaf Wunnicke, Eindhoven, NL;
Assignee:
ams International AG, Unterpremstaetten, AT;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L 9/12 (2006.01); G01L 7/08 (2006.01); G01L 15/00 (2006.01); G01L 13/02 (2006.01); G01L 9/00 (2006.01); G01L 1/14 (2006.01);
U.S. Cl.
CPC ...
G01L 9/12 (2013.01); G01L 1/14 (2013.01); G01L 1/142 (2013.01); G01L 7/08 (2013.01); G01L 7/088 (2013.01); G01L 9/0041 (2013.01); G01L 9/0045 (2013.01); G01L 9/0072 (2013.01); G01L 9/125 (2013.01); G01L 13/025 (2013.01); G01L 13/026 (2013.01); G01L 15/00 (2013.01);
Abstract
A pressure sensor measures pressure by measuring the deflection of a MEMS membrane using a capacitive read-out method. There are two ways to implement the invention. One involves the use of an integrated Pirani sensor and the other involves the use of an integrated resonator, to function as a reference pressure sensor, for measuring an internal cavity pressure.