The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 26, 2017

Filed:

Aug. 25, 2016
Applicant:

Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E.v., Munich, DE;

Inventors:

Vincent Fischer, Dresden, DE;

Benjamin Graffel, Zwickau, DE;

Falk Winckler, Rippien, DE;

Björn Meyer, Dresden, DE;

Matthias Fahland, Dresden, DE;

Steffen Günther, Dresden, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01); C23C 14/58 (2006.01); C23C 14/08 (2006.01);
U.S. Cl.
CPC ...
C23C 14/582 (2013.01); C23C 14/0036 (2013.01); C23C 14/086 (2013.01); C23C 14/5846 (2013.01); C23C 14/5873 (2013.01);
Abstract

Methods are provided for modifying a transparent and electrically conductive metal-oxide coating deposited on a plastic substrate. At least one surface region of the metal oxide coating is impinged by a pulse-driven electron beam. The impingement of the surface region of the metal oxide coating by the pulse-driven electron beam occurs inside a vacuum chamber into which hydrogen, argon, nitrogen, or oxygen, or a gas mixture of at least two of the above-mentioned gasses has been introduced.


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