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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9771645 B1

PDFFull Text
Date of Patent:
Sep. 26, 2017

Filed:

Jul. 06, 2015

Apparatus for deposition and substrate alignment method in the same

Applicant:

Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;

Inventor:

Jeong Won Han, Seongnam-si, KR;

Assignee:

Samsung Display Co., Ltd., Gyeonggi-do, KR;

Attorney:

Knobbe Martens Olson & Bear LLP

Primary Examiner:

Laura Edwards

Int. Cl.
CPC ...
C23C 14/04 (2006.01); C23C 14/50 (2006.01); H01L 21/683 (2006.01); H01L 21/3213 (2006.01); H01L 51/00 (2006.01); C23C 16/04 (2006.01); B05C 21/00 (2006.01); H02N 13/00 (2006.01);
U.S. Cl.
CPC ...
C23C 14/042 (2013.01); B05C 21/005 (2013.01); C23C 14/50 (2013.01); C23C 16/042 (2013.01); H01L 21/32139 (2013.01); H01L 21/6831 (2013.01); H01L 21/6833 (2013.01); H01L 51/0011 (2013.01); H02N 13/00 (2013.01);
Abstract

A deposition apparatus is disclosed. In one aspect, the apparatus includes a metal sheet of which an edge portion is integrally combined with a sheet frame and an electrostatic chuck attached to a bottom surface of the metal sheet and configured to pull a substrate based on a static electricity force. The apparatus also includes a metal mask placed below the electrostatic chuck, wherein an edge portion of the metal mask is combined with a mask frame, and wherein the metal mask has a predetermined patterned opening where the substrate is mounted to the upper surface thereof. The apparatus further includes a magnet plate placed above the metal sheet, and configured to pull the metal mask based on a magnetic force so as to attach the substrate to the electrostatic chuck.

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