The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2017
Filed:
Jan. 29, 2014
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Assignee:
INFINEON TECHNOLOGIES AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/26 (2014.01); G01R 31/30 (2006.01); H01L 23/00 (2006.01); G06F 21/87 (2013.01); G06F 21/88 (2013.01); G01R 31/28 (2006.01); H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 23/57 (2013.01); G06F 21/87 (2013.01); G06F 21/88 (2013.01); H01L 23/576 (2013.01); G01R 31/2884 (2013.01); H01L 22/34 (2013.01); H01L 2924/0002 (2013.01);
Abstract
According to one embodiment, a chip is described comprising a transistor level, a semiconductor region in, below, or in and below the transistor level, a test signal circuit configured to supply a test signal to the semiconductor region, a determiner configured to determine a behavior of the semiconductor region in response to the test signal and a detector configured to detect a change of geometry of the semiconductor region based on the behavior and a reference behavior of the semiconductor region in response to the test signal.