The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 19, 2017

Filed:

Jul. 14, 2016
Applicant:

Toshiba Memory Corporation, Minato-ku, JP;

Inventors:

Shinya Naito, Toyota, JP;

Takayuki Kakegawa, Yokkaichi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/528 (2006.01); H01L 27/1157 (2017.01); H01L 27/11582 (2017.01); H01L 27/11524 (2017.01); H01L 27/11556 (2017.01); H01L 23/522 (2006.01); H01L 23/532 (2006.01); H01L 21/768 (2006.01);
U.S. Cl.
CPC ...
H01L 23/5283 (2013.01); H01L 21/76816 (2013.01); H01L 21/76877 (2013.01); H01L 23/5226 (2013.01); H01L 23/5329 (2013.01); H01L 23/53257 (2013.01); H01L 27/1157 (2013.01); H01L 27/11524 (2013.01); H01L 27/11556 (2013.01); H01L 27/11582 (2013.01);
Abstract

According to one embodiment, a substrate includes a first portion and a second portion. The first portion has a columnar configuration. The second portion has an upper surface continuous with a side surface of the first portion via a corner. A plurality of electrode layers include a lowermost electrode layer opposing the side surface of the first portion above the second portion. An insulating film is provided between the side surface of the first portion and a side surface of the lowermost electrode layer, and between the upper surface of the second portion and a lower surface of the lowermost electrode layer. An angle formed between the upper surface of the second portion and the corner of the substrate on the insulating film side is greater than 90°.


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