The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 19, 2017
Filed:
Jun. 01, 2016
Applicant:
Alliance for Sustainable Energy, Llc, Golden, CO (US);
Inventors:
Lorelle Mansfield, Northglenn, CO (US);
Kannan Ramanathan, San Jose, CA (US);
Assignee:
Alliance for Sustainable Energy, LLC, Golden, CO (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 31/032 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02614 (2013.01); H01L 21/02568 (2013.01); H01L 21/02631 (2013.01); H01L 31/0322 (2013.01); Y02E 10/50 (2013.01); Y02P 70/521 (2015.11);
Abstract
Methods for forming CIGS films are provided. According to an aspect of the invention, a method of forming a CIGS film includes a precursor step, which includes simultaneously evaporating Cu, In, Ga, Se, and Sb onto a substrate. The Se is incident on the substrate at a rate of at least 20 Å/s. The method also includes a selenization step, which includes evaporating Se over the substrate after the precursor step.