The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 19, 2017

Filed:

Jan. 29, 2016
Applicant:

Keysight Technologies, Inc., Minneapolis, MN (US);

Inventor:
Assignee:

Keysight Technologies, Inc., Santa Rosa, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/02 (2006.01); G02F 1/03 (2006.01); G02B 21/16 (2006.01); G02B 21/00 (2006.01); G02B 27/42 (2006.01); G02B 21/12 (2006.01);
U.S. Cl.
CPC ...
G02B 21/16 (2013.01); G02B 21/0092 (2013.01); G02B 21/12 (2013.01); G02B 26/02 (2013.01); G02B 27/425 (2013.01);
Abstract

An illumination system and method for operating the same is disclosed. The illumination system includes a spatial light modulator (SLM), first and second optical systems, a controller and a mask. The SLM is positioned to receive an incident light beam. The first optical system images light leaving the SLM onto the mask that blocks part of the light. The second optical system images light leaving the mask onto a sample to be illuminated. The controller causes the SLM to display an SLM pattern that generates an illumination beam and a spurious light beam from the incident light beam, the illumination beam passing through the mask, wherein the mask includes a fixed part having a plurality of openings and a moveable part that moves in relation to the fixed part and that includes an opening.


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