The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 19, 2017

Filed:

May. 16, 2011
Applicants:

Wolfgang Holzapfel, Obing, DE;

Michael Hermann, Tacherting, DE;

Karsten Sändig, Palling, DE;

Inventors:

Wolfgang Holzapfel, Obing, DE;

Michael Hermann, Tacherting, DE;

Karsten Sändig, Palling, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/02 (2006.01); G01N 21/41 (2006.01); G01B 11/30 (2006.01); G01D 5/347 (2006.01); G01D 5/38 (2006.01);
U.S. Cl.
CPC ...
G01D 5/347 (2013.01); G01D 5/3473 (2013.01); G01D 5/38 (2013.01);
Abstract

An optical position measuring instrument including a scale and a scanning unit, wherein the scanning unit and the scale are movable with respect to one another. The scanning unit includes a detector unit, and a reflector unit that has a first and second wave front correctors and a beam direction inverter. The reflector unit is disposed so that beams first pass through the scale and the first wave front corrector, then a back-reflection of partial beams is effected in a direction of the scale, and the partial beams then pass through the scale and the second wave front corrector before the partial beams then arrive at the detector unit, wherein it is ensured that wave front deformations of the partial beams are converted into wave front deformations that compensate for resultant wave front deformations of the partial beams upon a second diffraction at the scale.


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