The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 12, 2017

Filed:

Feb. 11, 2014
Applicant:

Analog Devices, Inc., Norwood, MA (US);

Inventors:

Florian Thalmayr, Unterhaching, DE;

Jan H. Kuypers, Rehau, DE;

Klaus Juergen Schoepf, Chandler, AZ (US);

Assignee:

Analog Devices, Inc., Norwood, MA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 31/00 (2006.01); H03H 9/02 (2006.01); H03H 9/24 (2006.01); H01L 41/253 (2013.01); H01L 41/27 (2013.01); G01P 15/09 (2006.01); G01P 15/097 (2006.01); H01F 3/04 (2006.01); H01L 41/04 (2006.01);
U.S. Cl.
CPC ...
H03H 9/02102 (2013.01); H01L 41/253 (2013.01); H01L 41/27 (2013.01); H03H 9/02228 (2013.01); H03H 9/02275 (2013.01); H03H 9/02574 (2013.01); H03H 9/02834 (2013.01); H03H 9/2405 (2013.01); H04R 31/00 (2013.01); G01P 15/097 (2013.01); G01P 15/0922 (2013.01); H01F 3/04 (2013.01); H01L 41/04 (2013.01); H03H 9/02244 (2013.01); H03H 9/02535 (2013.01); H03H 9/02984 (2013.01); H03H 9/02992 (2013.01); H03H 2009/241 (2013.01); H04R 2201/003 (2013.01); H04R 2217/00 (2013.01); Y10T 29/42 (2015.01); Y10T 29/49005 (2015.01); Y10T 29/4908 (2015.01);
Abstract

Methods are described for constructing a mechanical resonating structure by applying an active layer on a surface of a compensating structure. The compensating structure comprises one or more materials having an adaptive resistance to deform that reduces a variance in a resonating frequency of the mechanical resonating structure, wherein at least the active layer and the compensating structure form a mechanical resonating structure having a plurality of layers of materials A thickness of each of the plurality of layers of materials results in a plurality of thickness ratios therebetween.


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