The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2017
Filed:
Jul. 23, 2015
Boe Technology Group Co., Ltd., Beijing, CN;
Wenwen Sun, Beijing, CN;
Abstract
The present disclosure provides a packaging method with films, a film package structure and a display device, which can effectively prevent water and oxygen from invading into a display unit and improve the bending resistance of the display unit. The method comprises: step 1, placing an device to be packaged in a PECVD device, and setting a mask plate to expose a packaging region of the device and mask a region of the device that does not need to be packaged; step 2, adjusting a gas that is passed into the PECVD device, and depositing a layer of inorganic silicon material film; step 3, adjusting Ngas that is passed into the PECVD device, and depositing a layer of organosilane film on the layer of the inorganic silicon material film using an organic material that reacts with the inorganic silicon material.