The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2017
Filed:
Dec. 24, 2014
Applicant:
Eclipse Energy Systems, Inc., St. Petersburg, FL (US);
Inventor:
Hulya Demiryont, Indian Rocks Beach, FL (US);
Assignee:
Eclipse Energy Systems, Inc., St. Petersburg, FL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 9/04 (2006.01); C23C 28/00 (2006.01); H01L 31/0216 (2014.01); H01L 31/0264 (2006.01); H01L 51/52 (2006.01); H01L 51/56 (2006.01);
U.S. Cl.
CPC ...
H01L 51/5253 (2013.01); H01L 51/5271 (2013.01); H01L 51/56 (2013.01);
Abstract
A protective film for a thin film device comprises a composite inorganic film that may be deposited on a parylene film or deposited directly on the device. Optionally, additional parylene and composite inorganic protective films may be added. The composite inorganic protective film is on the order of 1-100 nm thick and contains a material (e.g., Si) that forms a tenacious oxide at room temperature. When the device is exposed to air after deposition of the composite inorganic film, the oxidizable species oxidizes and fills voids to create an effective diffusion barrier.