The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2017
Filed:
Feb. 09, 2017
Screen Holdings Co., Ltd., Kyoto-shi, Kyoto, JP;
National Institute of Advanced Industrial Science and Technology, Tokyo, JP;
Akira Ito, Kyoto, JP;
Hidetoshi Nakanishi, Kyoto, JP;
Toshimitsu Mochizuki, Koriyama, JP;
Hidetaka Takato, Koriyama, JP;
Katsuhiko Shirasawa, Koriyama, JP;
SCREEN HOLDINGS CO., LTD., Kyoto, JP;
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY, Tokyo, JP;
Abstract
The inspection apparatus includes: a stage that retains the inspection sample; a light irradiator that irradiates the inspection sample with light having a predetermined wavelength to cause the inspection sample to emit a terahertz wave; a detector that detects electric field intensity of the terahertz wave emitted from the inspection sample; and a comparator that compares the electric field intensity of the terahertz wave emitted from the inspection sample to an evaluation reference value. The evaluation reference value is a value (for example, 90% of a saturation value) smaller than an absolute value of the saturation value of the electric field intensity of the terahertz wave, the terahertz wave being generated by irradiating a reference sample, which is a reference of the inspection sample, with the light while different voltages are applied to the reference sample.