The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 12, 2017

Filed:

Mar. 15, 2013
Applicants:

Tyco Electronics Corporation, Berwyn, PA (US);

Tyco Electronics Amp Gmbh, Bensheim, DE;

Inventors:

Soenke Sachs, Frankfurt am Main, DE;

Helge Schmidt, Speyer, DE;

Michael Leidner, Lambrecht, DE;

Eva Henschel, Bensheim, DE;

Dominique Freckmann, San Francisco, CA (US);

Marjorie Myers, Mount Wolf, PA (US);

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/30 (2006.01); C23C 14/58 (2006.01);
U.S. Cl.
CPC ...
C23C 14/30 (2013.01); C23C 14/5873 (2013.01);
Abstract

A method of manufacturing a coated structure on a substrate includes positioning a substrate in a vapor deposition chamber having a crucible with source material. The method includes evaporating the source material with electron beams from an irradiation source, the evaporated source material being deposited on the substrate as a coating layer. The method includes ablating the coating layer with the electron beams to selectively remove portions of the coating layer leaving a circuit structure on the substrate. The evaporating and ablating are accomplished in situ within the vapor deposition chamber using the same irradiation source.


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