The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2017
Filed:
Mar. 31, 2014
Kobe Steel, Ltd., Kobe-shi, JP;
Asuka Nagamine, Takasago, JP;
Hiroshi Tamagaki, Takasago, JP;
Kobe Steel, Ltd., Kobe-shi, JP;
Abstract
The present invention is to provide a deposition device capable of coping with a size change of a substrate only by replacing a magnet unit and a target material. A deposition device () of the present invention is to perform deposition onto a surface of a substrate W to be conveyed by using an evaporation source () facing a front surface of the substrate (W), and the evaporation source () has a target material (), a backing plate (), a magnet unit (), a cathode body (), and a cooling water flow passage (). The cooling water flow passage () is a space formed by separating the magnet unit () and the backing plate (), and the cooling water can be distributed through this space. As the magnet unit (), a short magnet unit can be arranged in correspondence with a narrow-width substrate having narrower width than that of the substrate (W), and as the target material (), a short target material is arranged in correspondence with width of the arrange magnet unit ().