The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 12, 2017

Filed:

Feb. 22, 2016
Applicant:

Versana Micro Inc, Scottsdale, AZ (US);

Inventor:

Bishnu Prasanna Gogoi, Scottsdale, AZ (US);

Assignee:

VERSANA MICRO INC, Scottsdale, AZ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81B 7/02 (2006.01); H01L 27/14 (2006.01); H01L 27/22 (2006.01); H01L 27/16 (2006.01); H05K 7/02 (2006.01); H01L 41/113 (2006.01);
U.S. Cl.
CPC ...
B81B 7/02 (2013.01); H01L 27/14 (2013.01); H01L 27/16 (2013.01); H01L 27/22 (2013.01); H01L 41/1132 (2013.01); H01L 41/1138 (2013.01); H05K 7/02 (2013.01); B81B 2201/0207 (2013.01); B81B 2201/0214 (2013.01); B81B 2201/0228 (2013.01); B81B 2201/0257 (2013.01); B81B 2201/0264 (2013.01); B81B 2201/0278 (2013.01); B81B 2207/012 (2013.01); B81B 2207/05 (2013.01); B81B 2207/09 (2013.01);
Abstract

A monolithically integrated multi-sensor (MIMS) is disclosed. A MIMs integrated circuit comprises a plurality of sensors. For example, the integrated circuit can comprise three or more sensors where each sensor measures a different parameter. The three or more sensors can share one or more layers to form each sensor structure. In one embodiment, the three or more sensors can comprise MEMs sensor structures. Examples of the sensors that can be formed on a MIMs integrated circuit are an inertial sensor, a pressure sensor, a tactile sensor, a humidity sensor, a temperature sensor, a microphone, a force sensor, a load sensor, a magnetic sensor, a flow sensor, a light sensor, an electric field sensor, an electrical impedance sensor, a galvanic skin response sensor, a chemical sensor, a gas sensor, a liquid sensor, a solids sensor, and a biological sensor.


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