The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 12, 2017
Filed:
Apr. 14, 2014
Canon Kabushiki Kaisha, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
Provided is an imaging method for correcting aberration generated when imaging an object to be inspected. The imaging method includes: irradiating an imaging area with a first light beam which is scanned by a scan unit and taking an image of the object to be inspected based on return light of the first light beam; detecting a moving amount of the object to be inspected; comparing the detected moving amount with a predetermined threshold value; and adjusting the imaging area to be irradiated with the first light beam. The adjusting includes determining in accordance with a result of the comparison to change the imaging area by at least one of: using the scan unit, and using an aberration correcting unit.