The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 05, 2017

Filed:

Oct. 27, 2015
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-Do, KR;

Inventors:

Dong-Kwon Kim, Gimcheon-si, KR;

Kang-Ill Seo, Chungcheongbuk-do, KR;

Assignee:

SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-Do, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/76 (2006.01); H01L 29/423 (2006.01); H01L 29/78 (2006.01); H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
H01L 29/42392 (2013.01); H01L 29/0673 (2013.01); H01L 29/785 (2013.01);
Abstract

A semiconductor device is provided as follows. A first nanowire is disposed on a substrate. The first nanowire is extended in a first direction and spaced apart from the substrate. A gate electrode surrounds a periphery of the first nanowire. The gate electrode is extended in a second direction intersecting the first direction. A gate spacer is formed on a sidewall of the gate electrode. The gate spacer includes an inner sidewall and an outer sidewall facing each other. The inner sidewall of the gate spacer faces the sidewall of the gate electrode. An end portion of the first nanowire is protruded from the outer sidewall of the gate spacer. A source/drain epitaxial layer is disposed on at least one side of the gate electrode. The source/drain is connected to the protruded end portion of the first nanowire.


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