The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2017
Filed:
Aug. 31, 2016
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Kota Iwasaki, Atsugi, JP;
Hiroyuki Hashimoto, Yokohama, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/00 (2006.01); H01J 49/16 (2006.01); H01J 49/06 (2006.01); H01J 37/244 (2006.01); H01J 37/12 (2006.01); H01J 37/141 (2006.01); H01J 49/14 (2006.01);
U.S. Cl.
CPC ...
H01J 49/0004 (2013.01); H01J 37/12 (2013.01); H01J 37/141 (2013.01); H01J 37/244 (2013.01); H01J 49/06 (2013.01); H01J 49/142 (2013.01); H01J 49/161 (2013.01); H01J 2237/226 (2013.01);
Abstract
A charged particle image measuring device includes a sample stage, a charged particle lens opposite the sample stage, a two-dimensional detector, a first diaphragm disposed between the sample stage and a position of a crossover that is formed by the charged particle lens and that is closest to a sample, and a second diaphragm disposed between the first diaphragm and the two-dimensional detector.