The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 05, 2017

Filed:

Nov. 24, 2014
Applicant:

Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E.v., München, DE;

Inventors:

Ulrich Hofmann, Itzehoe, DE;

Frank Senger, Hardenfeld, DE;

Thomas von Wantoch, Kiel, DE;

Christian Mallas, Schwentinental, DE;

Joachim Janes, Itzehoe, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); G02B 26/10 (2006.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
G02B 26/101 (2013.01); B81B 3/0043 (2013.01); G02B 26/0833 (2013.01); G02B 26/0841 (2013.01); B81B 2201/042 (2013.01); B81B 2203/0163 (2013.01); B81B 2203/058 (2013.01);
Abstract

What is proposed is: a micromirror arrangement which comprises: a first spring-mass oscillator, which has an oscillatory body forming a mirror plate () and first spring elements (); a second spring-mass oscillator, which has a drive plate () and second spring elements () and which is connected to a carrier arrangement () via the second spring elements (), wherein the first spring-mass oscillator is suspended in the second spring-mass oscillator via the first spring elements (); and a drive arrangement (), which is assigned to the drive plate and is designed to cause the drive plate () to oscillate. The oscillatory body () is suspended, movably on two axes, via the first spring elements () on the drive plate (), and the drive plate () is connected, movably on two axes, to the carrier arrangement (), wherein the drive arrangement () is embodied as a two-axis drive and is designed to drive the drive plate () on two axes such that the oscillatory body () oscillates on two axes at in each case one of its orthogonal eigenmodes or close to this eigenmode.


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