The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2017
Filed:
May. 06, 2011
Julian F. Kamibayashiyama, San Diego, CA (US);
Jeffrey D. Navarro, Chula Vista, CA (US);
Julian F. Kamibayashiyama, San Diego, CA (US);
Jeffrey D. Navarro, Chula Vista, CA (US);
Parker-Hannifin Corporation, Cleveland, OH (US);
Abstract
An elastomeric polymeric sealincludes a sealing surfaceand an adjacent fluid repelling surface. The fluid repelling surfaceis hydrophobic or superhydrophobic and is of substantially greater surface area than sealing surface. During manufacture of a silicone wafer, sealing surfaceengages the waferto seal against leakage of electroplate solution fluid. The repelling surfacedirects the electroplate solution fluid away from the sealing surfaceduring and after electroplating. The hydrophobic or superhydrophobic repelling surface includes a pattern of micro-pillarsand micro-channels between the pillars. The pillars are formed in the base material of the seal by laser ablation of the base material or by molding. Other sealsandinclude a sealing surface and an adjacent hydrophobic or superhydrophobic repelling or stiction reduction surface. A fluidic deviceincludes platesandwith micro-channels and micro-pillars.