The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2017
Filed:
Jul. 24, 2015
Applicant:
Oerlikon Surface Solutions Ag, Pfaffikon, Pfaffikon SZ, CH;
Inventors:
Helmut Riedl, Kirchberg/Walde, AT;
Mirjam Arndt, Bad Ragaz, CH;
Peter Polcik, Reutte, AT;
Paul Heinz Mayrhofer, Neckenmarkt, AT;
Assignee:
OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON, Pfaffikon SZ, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 28/00 (2006.01); C23C 14/35 (2006.01); C23C 14/34 (2006.01); C23C 14/06 (2006.01); C23C 14/32 (2006.01); C23C 28/04 (2006.01);
U.S. Cl.
CPC ...
C23C 28/42 (2013.01); C23C 14/067 (2013.01); C23C 14/0641 (2013.01); C23C 14/325 (2013.01); C23C 14/3485 (2013.01); C23C 14/35 (2013.01); C23C 28/042 (2013.01);
Abstract
A coating including a multilayer film, which includes a multi-layered structure including layers of the type I and layers of the type II. The layers of the type I are metal nitride with a chemical composition given by the formula Me1Me2ZI and the layers of the type II are a Mo-comprising material with chemical composition given by the formula MoSiBZII or MoSiB. Also described is a method for depositing the above mentioned coating.