The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 05, 2017

Filed:

Jun. 24, 2016
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Motoki Takabe, Shiojiri, JP;

Shiro Yazaki, Chino, JP;

Yuma Fukuzawa, Matsumoto, JP;

Eiju Hirai, Azumino, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/045 (2006.01); B41J 2/14 (2006.01); H01L 41/047 (2006.01); H01L 41/08 (2006.01); H01L 41/083 (2006.01); H01L 41/09 (2006.01); H01L 41/187 (2006.01); H01L 41/332 (2013.01);
U.S. Cl.
CPC ...
B41J 2/14274 (2013.01); B41J 2/14233 (2013.01); H01L 41/0471 (2013.01); H01L 41/081 (2013.01); H01L 41/083 (2013.01); H01L 41/0838 (2013.01); H01L 41/09 (2013.01); H01L 41/1876 (2013.01); H01L 41/332 (2013.01); B41J 2002/14241 (2013.01); B41J 2202/11 (2013.01);
Abstract

An empty chamber component includes a pressure chamber formation substrate where a pressure chamber as an empty chamber is defined and a communication substrate bonded to the pressure chamber formation substrate. A piezoelectric element is provided on one side of the pressure chamber formation substrate. A flexible surface is located between the piezoelectric element and the pressure chamber. Empty portions are defined by the communication substrate closing recessed portions in the pressure chamber formation substrate. The empty portions are formed at positions where ends of the active section of the piezoelectric element pass through the empty portions in plan view.


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