The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 05, 2017
Filed:
Sep. 04, 2014
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Chih Hung Chen, Sunnyvale, CA (US);
Jay Gurusamy, Santa Clara, CA (US);
Steven M. Zuniga, Soquel, CA (US);
Assignee:
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 41/047 (2006.01); B24B 37/10 (2012.01);
U.S. Cl.
CPC ...
B24B 41/047 (2013.01); B24B 37/10 (2013.01);
Abstract
A polishing device includes a housing, a flexible base coupled to the housing, and a contact region disposed on a first side of the flexible base, wherein the flexible base expands and contracts based on pressure contained within the housing and a second side of the flexible base to form a contact area on the first side that is less than a surface area of the flexible base.