The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 29, 2017

Filed:

Jul. 10, 2013
Applicants:

Universite Joseph Fourier—grenoble 1, St. Martin d'Hères, FR;

Jacques Pelletier, St. Martin d'Hères, FR;

Inventors:

Ana Lacoste, Saint Martin le Vinoux, FR;

Jacques Pelletier, Saint Martin d'Hères, FR;

Assignees:

Universite Joseph Fourier—Grenoble 1, St. Martin D'Heres, FR;

Other;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/28 (2006.01); H05H 1/46 (2006.01); C23C 14/35 (2006.01); C23C 14/34 (2006.01); H01J 37/34 (2006.01); H05H 1/18 (2006.01);
U.S. Cl.
CPC ...
H05H 1/46 (2013.01); C23C 14/3471 (2013.01); C23C 14/357 (2013.01); H01J 37/3405 (2013.01); H05H 1/18 (2013.01); H01J 2237/327 (2013.01); H05H 2001/463 (2013.01); H05H 2001/4622 (2013.01); H05H 2242/10 (2013.01);
Abstract

The disclosure includes a coaxial microwave applicator for plasma production, including a coaxial tube formed by a central core and an outer conductor separated from the central core by an annular space allowing propagation of microwaves. The applicator includes: a cylindrical permanent magnet disposed at the end of the central core; and at least one annular permanent magnet disposed at the end of the outer conductor, all of the magnets disposed at the end of the coaxial tube having the same direction of magnetization. The magnetization of the magnets forms a magnetic field suitable for generating, in a zone away from the end of the applicator, an electronic cyclotronic resonance coupling with the electric microwave field of the applicator. The external radius and the magnetization of the annular magnet are selected such that the magnetic field lines generated by the magnets pass through the coupling zone in a direction substantially parallel to the axis of the applicator.


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