The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2017
Filed:
Oct. 15, 2012
Applied Materials, Inc., Santa Clara, CA (US);
Heller Industries, Inc., Florham Park, NJ (US);
Iftikhar Ahmad, Raleigh, NC (US);
Clayton R. DeCamillis, Raleigh, NC (US);
Robert J Schauer, Durham, NC (US);
James E. Neville, Springfield, NJ (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
HELLER INDUSTRIES, INC., Florham Park, NJ (US);
Abstract
An apparatus for thermal treatment of coatings on substrates includes a microwave applicator cavity; a microwave power supply to deliver power to the cavity; a thermally insulated microwave-transparent compartment within the cavity, large enough to contain the coated substrate while occupying no more than 50% of the total volume of the cavity; a means of supporting the coated substrate within the compartment; an adjustable IR heating source in the compartment and facing the substrate so that a selected amount of IR heating may be applied to the substrate; and, a non-contacting temperature measurement device to measure the temperature of the coating. Related methods for using the apparatus to process different kinds of films are also disclosed.