The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 29, 2017

Filed:

Feb. 05, 2014
Applicant:

Massachusetts Institute of Technology, Cambridge, MA (US);

Inventors:

Stephen Angelo Guerrera, Jamaica Plain, MA (US);

Akintunde I. Akinwande, Newton, MA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/073 (2006.01); H01L 21/00 (2006.01); H01J 37/065 (2006.01); H01J 37/317 (2006.01); H01J 37/30 (2006.01);
U.S. Cl.
CPC ...
H01J 37/073 (2013.01); H01J 37/065 (2013.01); H01J 37/3007 (2013.01); H01J 37/3174 (2013.01); H01J 37/3177 (2013.01); H01L 21/00 (2013.01); H01J 2237/0473 (2013.01); H01J 2237/063 (2013.01); H01J 2237/3175 (2013.01); H01J 2237/31781 (2013.01);
Abstract

An electron beam apparatus is disclosed that includes a plurality of current source elements disposed in at least one field emitter array. Each current source element can be a gated vertical transistor, an ungated vertical transistor, or a current controlled channel that is proximate to an optically-modulated current source. The electron beam apparatus includes a plurality of field emitter tips, each field emitter tip of the plurality of field emitter tips being coupled to a current source element of the plurality of current source elements. The electron beam apparatus is configured to allow selective activation of one or more of the current source elements.


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