The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 29, 2017

Filed:

May. 13, 2015
Applicant:

Asm Ip Holding B.v., Almere, NL;

Inventor:

Taku Omori, Akiruno, JP;

Assignee:

ASM IP HOLDING B.V., Almere, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 9/445 (2006.01); H04L 29/08 (2006.01); G05B 15/02 (2006.01); G05B 19/042 (2006.01);
U.S. Cl.
CPC ...
G06F 8/61 (2013.01); G05B 15/02 (2013.01); G05B 19/0426 (2013.01); H04L 67/10 (2013.01); G05B 2219/13164 (2013.01);
Abstract

A substrate processing system includes a main controller, a module controller connected to the main controller, the module controller controlling a device on the basis of a command from the main controller, and a programmable logic controller connected to the module controller, wherein the module controller automatically downloads, from the main controller, module controller software to be used for control of the module controller, PLC software to be used for control of the programmable logic controller, and an automatic transfer software for automatically transferring the PLC software to the programmable logic controller.


Find Patent Forward Citations

Omori, Taku. (2017). Substrate processing system and method of installing plc software (U.S. Patent No. 9747092). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9747092

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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