The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2017
Filed:
Apr. 11, 2013
Applicant:
University of Virginia Patent Foundation, Charlottesville, VA (US);
Inventors:
Jianzhong Zhu, Crozet, VA (US);
Hilary Bart-Smith, Charlottesville, VA (US);
Zheng Chen, Andover, KS (US);
Assignee:
University of Virginia Patent Foundation, Charlottesville, VA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F 1/684 (2006.01); G01F 1/692 (2006.01); G01F 1/696 (2006.01); H05K 3/00 (2006.01); H05K 3/46 (2006.01); G01F 15/00 (2006.01);
U.S. Cl.
CPC ...
G01F 1/684 (2013.01); G01F 1/6845 (2013.01); G01F 1/692 (2013.01); G01F 1/696 (2013.01); G01F 15/006 (2013.01); H05K 3/0011 (2013.01); H05K 3/46 (2013.01); Y10T 29/49155 (2015.01);
Abstract
A gas flow sensing device, and related method of manufacturing, comprising a conductive layer encapsulated in dielectric film, suspended over a cavity to form a diaphragm. The conductive layer functions as both a heating a sensing element and is patterned to provide uniform heat distribution across the diaphragm. The device is designed to sense flow from any direction relative to the device and the design of the dielectric film and diaphragm reduces sensor drift during prolonged operation.