The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2017
Filed:
Feb. 11, 2016
Applicant:
University of South Carolina, Columbia, SC (US);
Inventors:
Joshua Tarbutton, Columbia, SC (US);
Chabum Lee, Columbia, SC (US);
Assignee:
University of South Carolina, Columbia, SC (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/00 (2006.01); G01B 11/27 (2006.01);
U.S. Cl.
CPC ...
G01B 11/272 (2013.01);
Abstract
Methods are provided for determining the position of a substrate. The edge diffraction model suitable for the proposed measurement apparatus was mathematically derived, and the effect of the parameters associated with the edge diffraction was investigated. In addition, the fundamental limits are discussed about the linearity and resolution of the sensor by estimating the effects of edge roughness and sharpness of the knife edge on the knife edge diffraction of an incident wave based on Kirchhoff approximation.