The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 29, 2017
Filed:
Jun. 03, 2015
Dongfang Jingyuan Electron Limited, Beijing, CN;
Yuhai Mu, Fremont, CA (US);
Zongqiang Yu, San Jose, CA (US);
Dongfang Jingyuan Electron Limited, Beijing, CN;
Abstract
A drive mechanism to move an optical component sensitive to particles is described. The drive mechanism has high precision in rotation, great reliability and durability life, no backlash, and far less particle contamination. The drive mechanism can be advantageously used in high precision rotation driving processes for opto-mechanical inspection systems that require high movement precision and no-contamination. In one embodiment, two pulleys are used with their axes to be parallel from each other, two bands are used to rotate the pulleys in opposite directions. An eccentric disk mechanism is used to fine-tune the distance between the two pulleys so that tensions on the two bands can be optimized.