The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 22, 2017

Filed:

Oct. 07, 2014
Applicants:

Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;

Dongwoo Fine-chem Co., Ltd., Iksan, Jeonrabuk-Do, KR;

Inventors:

Jong-Hyun Choung, Yongin, KR;

In-Bae Kim, Yongin, KR;

Hong-Sick Park, Yongin, KR;

Seon-Il Kim, Yongin, KR;

In-Seol Kuk, Iksan, KR;

Gi-Yong Nam, Iksan, KR;

Young-Chul Park, Iksan, KR;

In-Ho Yu, Iksan, KR;

Young-Jin Yoon, Iksan, KR;

Suck-Jun Lee, Iksan, KR;

Assignees:

Samsung Display Co., Ltd., Yongin, Gyeonggi-do, KR;

Dongwoo Fine-Chem Co., Ltd., Iksan, Joenrabuk-do, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23F 1/18 (2006.01); H01L 29/66 (2006.01); H01L 27/12 (2006.01); H01L 21/3213 (2006.01); C23F 1/02 (2006.01); C23F 1/26 (2006.01); H01L 29/45 (2006.01); H01L 29/49 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66765 (2013.01); C23F 1/02 (2013.01); C23F 1/18 (2013.01); C23F 1/26 (2013.01); H01L 21/32134 (2013.01); H01L 27/124 (2013.01); H01L 27/1259 (2013.01); H01L 29/458 (2013.01); H01L 29/4908 (2013.01);
Abstract

An etchant composition is provided comprising a persulfate from 0.5 to 20 wt %; a fluoride compound from 0.01 to 2 wt %; an inorganic acid from 1 to 10 wt %; a N (nitrogen atom)-containing heterocyclic compound from 0.5 to 5 wt %; a chloride compound from 0.1 to 5 wt %; a copper salt from 0.05 to 3 wt %; an organic acid or an organic acid salt from 0.1 to 10 wt %; an electron-donating compound from at 0.1 to 5 wt %; and a solvent of the residual amount. Also provided is a method of manufacturing a display device by using the same.


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