The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 22, 2017

Filed:

Jan. 13, 2015
Applicant:

Screen Holdings Co., Ltd., Kyoto, JP;

Inventors:

Takuya Miyashita, Kyoto, JP;

Satoshi Segawa, Kyoto, JP;

Naoyuki Osada, Kyoto, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 13/364 (2006.01); H01L 23/28 (2006.01); G05B 19/418 (2006.01);
U.S. Cl.
CPC ...
G06F 13/364 (2013.01); G05B 19/4185 (2013.01); H01L 23/28 (2013.01); Y02P 90/18 (2015.11);
Abstract

A valve control unit includes a data reading/selecting unit, which reads each of signals transmitted onto a serial bus, and selects a flow rate data signal from among the read signals. Therefore, the valve control unit can acquire the flow rate data signal from the serial bus without allowing the flow rate data signal to pass via the master IC. As a result, it is made possible to ensure real time properties of feedback control, which adjusts a needle valve based on a measurement result of a flowmeter, while reducing a load applied to a CPU that controls the master IC. Moreover, it is not necessary to provide an additional instrument for transferring analog signals between slave devices, and accordingly, a size increase and cost increase of an apparatus can be suppressed.


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