The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2017
Filed:
May. 27, 2015
Denso Corporation, Kariya, Aichi-pref., JP;
Tohoku University, Aoba-ku, Sendai-shi, Miyagi, JP;
National University Corporation Chiba University, Inage-ku, Chiba-shi, Chiba, JP;
Akihiko Teshigahara, Nisshin, JP;
Toshihiko Takahata, Tokai, JP;
Takao Iwaki, Miyoshi, JP;
Shuji Tanaka, Sendai, JP;
Masayoshi Esashi, Sendai, JP;
Kenya Hashimoto, Chiba, JP;
DENSO CORPORATION, Kariya, JP;
TOHOKU UNIVERSITY, Sendai-shi, JP;
National University Corporation Chiba University, Chiba-shi, JP;
Abstract
A surface acoustic wave (SAW) sensor includes a surface acoustic wave material and a comb-teeth electrode. The surface acoustic wave material is to be arranged at a place where the surface acoustic wave material is distorted by physical quantity such as stress. The comb-teeth electrode is arranged on the surface of the surface acoustic wave material to excite a surface acoustic wave to the surface acoustic wave material. The surface acoustic wave material has a sapphire board and a ScAlN film arranged on a surface of the sapphire board.