The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2017
Filed:
Jul. 02, 2015
Epistar Corporation, Hsinchu, TW;
Yuan-Hung Huang, Hsinchu, TW;
Chung-Kuei Huang, Hsinchu, TW;
Ai-Fa Lee, Hsinchu, TW;
Shang-Po Chien, Hsinchu, TW;
Meng-Tu Chiang, Hsinchu, TW;
Chi-Ling Lee, Hsinchu, TW;
Ying-Chun Chuang, Hsinchu, TW;
Wen-Hsien Lo, Hsinchu, TW;
Epistar Corporation, Hsinchu, TW;
Abstract
A susceptor, comprising: a base part; multiple holders distributed on the base part for accommodating wafers; an inner ring connected to the base part; and an outer ring detachably connected to the base part and separated from the inner ring; wherein the inner ring and the outer ring separate the holders from one another. A susceptor, comprising: a base part; multiple holders distributed on the base part for accommodating wafers; a cover comprising a first surface facing the base part, and a second surface opposite to the first surface; a first positioning structure; a second positioning structure formed in the first surface; and a third positioning structure formed in the base part, wherein the cover connects to the base part by associating the first positioning structure with the second positioning structure and the third positioning structure.