The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 22, 2017
Filed:
Apr. 24, 2013
Applicant:
Sony Corporation, Tokyo, JP;
Inventors:
Toshiyuki Kobayashi, Kanagawa, JP;
Keisuke Shimizu, Kanagawa, JP;
Koji Kadono, Kanagawa, JP;
Yukiko Mizuguchi, Tokyo, JP;
Yosuke Murakami, Kanagawa, JP;
Assignee:
SONY CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/458 (2006.01); C23C 14/56 (2006.01); C23C 16/02 (2006.01); C23C 16/26 (2006.01); C23C 16/46 (2006.01); C23C 16/54 (2006.01); B65H 20/02 (2006.01); C23C 16/52 (2006.01); C23C 14/06 (2006.01); C23C 14/24 (2006.01); C23C 14/54 (2006.01);
U.S. Cl.
CPC ...
C23C 14/562 (2013.01); B65H 20/02 (2013.01); C23C 14/0605 (2013.01); C23C 14/24 (2013.01); C23C 14/54 (2013.01); C23C 16/0209 (2013.01); C23C 16/26 (2013.01); C23C 16/458 (2013.01); C23C 16/46 (2013.01); C23C 16/52 (2013.01); C23C 16/545 (2013.01); B65H 2301/5143 (2013.01); B65H 2301/51145 (2013.01); B65H 2404/143 (2013.01); B65H 2511/112 (2013.01); B65H 2513/11 (2013.01); B65H 2515/31 (2013.01); B65H 2553/412 (2013.01); B65H 2701/173 (2013.01);
Abstract
There is provided a film-forming apparatus including a roll-to-roll mechanism and a heating unit. The roll-to-roll mechanism is configured to transport a film-forming target and includes a tensile force relaxation unit configured to relax a tensile force applied to the transported film-forming target. The heating unit is configured to heat the film-forming target transported by the roll-to-roll mechanism.