The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 22, 2017

Filed:

Aug. 28, 2015
Applicants:

International Business Machines Corporation, Armonk, NY (US);

Yale University, New Haven, CT (US);

Inventors:

Emily R. Kinser, Poughkeepsie, NY (US);

Jan Schroers, Hamden, CT (US);

Golden Kumar, Lubbock, TX (US);

Assignees:

International Business Machines Corporation, Armonk, NY (US);

Yale University, New Haven, CT (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B81C 99/00 (2010.01); B22C 9/06 (2006.01);
U.S. Cl.
CPC ...
B81C 99/009 (2013.01); B22C 9/06 (2013.01);
Abstract

A mold structure having high-precision multi-dimensional components which includes a first oxide layer superimposed on a top of a first semiconductor substrate; a second oxide layer superimposed on a top of a second semiconductor substrate; integrated designs patterned in at least one of the oxide layers; and the first and second semiconductor substrates bonded to one another into a three dimensional (3D) mold such that the first oxide layer only makes partial contact with the second oxide layer such that a portion of the first oxide layer avoids contact with the second oxide layer, the portion of the first oxide layer directly opposite a surface portion of the second semiconductor substrate that is free of the second oxide, the 3D mold selectively filled with a filling material to form a molded high-precision multi-dimensional component.


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