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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9734994 B1

PDFFull Text
Date of Patent:
Aug. 15, 2017

Filed:

Dec. 04, 2012

Crystalline alloy having glass-forming ability, preparation method thereof, alloy target for sputtering, and preparation method thereof

Applicant:

Korea Institute of Industrial Technology, Chungcheongnam-do, KR;

Inventors:

Seung-Yong Shin, Seoul, KR;

Kyoung-Il Moon, Incheon, KR;

Ju-Hyun Sun, Incheon, KR;

Chang-Hun Lee, Incheon, KR;

Assignee:

KOREA INSTITUTE OF INDUSTRIAL TECHNOLOGY, Cheonan-si, Chungcheongnam-do, KR;

Attorneys:

Ladas & Parry LLP

Loren K. Thompson

Primary Examiner:

Jessee Roe

Assistant Examiner:

Christopher Kessler

Int. Cl.
CPC ...
H01J 37/32 (2006.01); C22C 16/00 (2006.01); C23C 14/34 (2006.01); B22F 3/12 (2006.01); C22C 30/02 (2006.01); C22C 1/00 (2006.01); C22C 45/00 (2006.01); B22F 9/08 (2006.01); B22F 9/10 (2006.01); C22C 1/04 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3255 (2013.01); B22F 3/12 (2013.01); B22F 9/082 (2013.01); B22F 9/10 (2013.01); C22C 1/002 (2013.01); C22C 1/0458 (2013.01); C22C 16/00 (2013.01); C22C 30/02 (2013.01); C22C 45/00 (2013.01); C23C 14/3414 (2013.01); C22C 2200/02 (2013.01);
Abstract

Provided are a crystalline alloy having significantly better thermal stability than an amorphous alloy as well as glass-forming ability, and a method of manufacturing the crystalline alloy. The present invention also provides an alloy sputtering target that is manufactured by using the crystalline alloy, and a method of manufacturing the alloy target. According to an aspect of the present invention, provided is a crystalline alloy having glass-forming ability which is formed of three or more elements having glass-forming ability, wherein the average grain size of the alloy is in a range of 0.1 μm to 5 μm and the alloy includes 5 at % to 20 at % of aluminum (Al), 15 at % to 40 at % of any one or more selected from copper (Cu) and nickel (Ni), and the remainder being zirconium (Zr).

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