The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 15, 2017
Filed:
May. 24, 2016
Applicant:
Nissin Ion Equipment Co., Ltd., Kyoto-shi, Kyoto, JP;
Inventors:
Sami K. Hahto, Nashua, NH (US);
Tetsuro Yamamoto, Billerica, MA (US);
Assignee:
Nissin Ion Equipment Co., Ltd., Kyoto, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/302 (2006.01); C23C 14/48 (2006.01); G21K 5/00 (2006.01); H01J 37/147 (2006.01); C23C 14/54 (2006.01); H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
H01J 37/1472 (2013.01); C23C 14/48 (2013.01); C23C 14/54 (2013.01); H01J 37/302 (2013.01); H01J 37/3171 (2013.01); G21K 5/00 (2013.01); H01J 2237/1504 (2013.01); H01J 2237/30472 (2013.01); H01J 2237/31701 (2013.01);
Abstract
A beam current density distribution adjustment device is provided. The device includes member pairs in a long side direction of a ribbon beam, the member pairs adjusting a beam current density distribution in the long side direction of the ribbon beam by using an electric field or a magnetic field, members of each of the member pairs being disposed with the ribbon beam in-between the members. Opposing surfaces of the member pairs adjacent to each other in the long side direction of the ribbon beam are partially not parallel to a traveling direction of the ribbon beam.